[Ernest_at_the_Beach]

Today EUV is an acronym for Extreme Ultra Violent ...light source....Major new Technology and is almost Rube Goldberg in its workings.

[smokingfrog]

ultraviolet

http://whatis.techtarget.com/definition/extreme-ultraviolet-lithography-EUVL

[Zathras]

Currently I am working on a EUV chip design.
I think there are 20 EUV steppers doing test chips in the world.
Intel, GF and Samsung are using them.
GF and Samsung using same design rules.

Frightfully difficult below M0 layer.