Marine invertebrates, mostly.
Speaking of machines, how about those bacteria that were recently shown to be able to sprout electroconductive wires!
Then, there's the bacteria that mine gold, and copper, and so forth.
Buncha' machines I tell you, and they work just as good today as they did billions of years ago ~
"Marine invertebrates, mostly."
I am gonna cover all the bases and go with "Dead Things"