Cool, and others are developing other designs. In context of the posted article, the interesting one of these designs would be the free-piston design, which could produce mainly vibration as its output. This article discusses a micro generator which wants vibration as its input, so . . .
A jet turbine engine the diameter of a human hair was developed with the idea that they could be manufactured using the same chip manufacturing techniques used to make computer chips. It works and some of these devices are already being field tested at the Marine test field at Quantico!!