The corrector needs various additional modules such as a fiber-optically coupled diffraction camera for proper functioning. For best performance of the total system, the objective lens water cooling circuit is replaced by a new design that minimizes water turbulence. Further, the VG vacuum system is upgraded to an all-dry vacuum system comprising 2 ion pumps and a molecular drag pre-pumping station, for increased mechanical stability (no more boiling oil and evaporating nitrogen) and decreased sample contamination.
I figured it would be something like that.
5 posted on 09/21/2004 6:28:07 PM PDT by OSHA
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