EUV is a very expensive process.
They started developing it back in the 90’s and for a long time, I was pretty sure they would never get it to work.
ASML’s 150M machine which saved the chip industry.
https://www.youtube.com/watch?v=5Ge2RcvDlgw
That was a very good video.
I ended my photolithography career at TI at the end of 1994.