I have seen screen shots of those Benford distributions but no links to the actual data.
It depends on the system the state uses, and what detail it exposes to the web user. I haven't found the Illinois or Pennsylvania precinct-level data yet, but I did find Milwaukee.
I just recreated the Milwaukee charts using the data found here: https://county.milwaukee.gov/EN/County-Clerk/Off-Nav/Election-Results/Election-Results-Fall-2020
Under the Presidential race summary, click the box labeled "Expand / Collapse Totals by Wards" to get the precinct details.
-PJ
Click "Download Results" to get a spreadsheet with all the precincts. One difference from the chart in the article is that this file has 1,599 precincts, not the 2,054 shown in the article. President Trump's chart has the digit 2 greater than 1, but otherwise the chart fits the law. Biden's chart matches the shape of the chart in the article.
-PJ
https://results.enr.clarityelections.com/PA/Allegheny/106267/web.264614/#/detail/0004. Download the xls file on the right side of the page.
I have now recreated all three cities in the article.
-PJ